Welcome to OKSUN's official website!
Service line
86-0755-81452366
86-0755-81452399
Products
Contact Us
Standard plasma etcher ICP-RIE
Introduction

ICP Power: 1000W (13.56mhz)

Offset power: 600 W (12.56 MHz)

Substrate size: Max 6 "wafer

Surface cooling: Back cooling

Heat exchanger: -30 ℃ ~ 100 ℃

System control: PLC + touch (Manual L)

Optional:

Automatic CNC, data recording (PLC + PC)

Process parameters of plasma etcher



The Word Best Plasma
Contact: Mr. Yu, Mr. Tang
Tel:13612999216 13632910173
Previous:Standard PE-CVD Next: Standard RTP,